Used LAM RESEARCH / NOVELLUS Vector Extreme #293767046 for sale

LAM RESEARCH / NOVELLUS Vector Extreme is an etch/ash tool used to create precise, dimensional shapes in a variety of substrates such as silicon, photoresists, metals, and oxides. It has an industry-leading accuracy and precise control of etching process parameters such as time, temperature, and gas flow rate. The equipment is designed to enable efficient processing of large substrates, up to 450 mm in size, and its flexible architecture enables faster recipe development and execution. The system consists of a number of key components including a main chamber, an etching source, and a number of accompanying components. The main chamber is a high accuracy and low pressure chamber specially designed to optimize the etching process. It consists of a heated inner liner and powerful polycrystalline diamond heaters that provide uniform heating across the entire substrate. Additionally, the chamber has an interface for multiple etching species (gases, liquids, etc.) and robust vacuum and pressure control systems. The etching source is the centerpiece of the unit. It contains a number of powerful, high-precision radio frequency (RF) sources that generate highly localized plasma fields to precisely etch the substrate. The RF sources are connected to automated tuning systems that ensure the parameters of the etching process remain consistent. The accompanying components of the machine include various ports for introducing gases, heating elements, and a variety of sensors and actuators that control the pressure, temperature, and flow-rate of the substrate. A robust set of safety systems are also present to ensure the longevity of the tool and the safety of its operators. NOVELLUS Vector Extreme is a powerful etching/ ash tool used in a variety of substrates. Its precision control of process parameters, high-accuracy main chamber, RF sources, and associated components make it an industry leader in etching. It enables faster recipe development with a flexible architecture and is capable of producing precise shapes on large substrates, up to 450 mm in size. With its robust safety systems, high efficiency, and rugged construction, LAM RESEARCH VECTOR EXTREME is an ideal choice for etching/ash.