Used LAM RESEARCH / NOVELLUS Vector Extreme #9294398 for sale

ID: 9294398
Wafer Size: 12"
Vintage: 2010
CVD System, 12" Process: SiN / SiO 2010 vintage.
LAM RESEARCH / NOVELLUS Vector Extreme is a metal etching machine designed for precise etching and annealing operations. It is ideal for creating components with micro-detail requirements for advanced semiconductor packaging and component fabrication. NOVELLUS Vector Extreme is a fully automated equipment that uses four independent wafer scan stages in a single system, allowing it to process up to four wafers at a time. It is capable of etching metals such as aluminum, copper, tungsten, and titanium with unmatched repeatability, accuracy, and reliability. LAM RESEARCH VECTOR EXTREME utilizes a powerful, 8-axis robotic arm which is capable of annealing and etching layers with tolerances as low as one-hundredth of a micron and move up to 3nm lateral speed. This allows it to quickly and accurately fabricate the desired layer with minimal damage to underlying layers. Its repeatability and precise control of the vaporized metal make it a reliable option for micro-packaging applications. LAM RESEARCH Vector Extreme is equipped with a feature-rich user interface that provides comprehensive information for set-up, operation, and monitoring of the machine. This user-friendly interface allows users to monitor all stages of the etching and annealing processes, including the cooling stage, to ensure consistent and reliable production results. LAM RESEARCH / NOVELLUS VECTOR EXTREME utilizes a unique vaporized metal effluent control unit designed to ensure a clean and compliant operational environment. The vaporized metal effluent is filtered using multiple filtration systems that remove all particulate and gaseous contaminants from the air, reducing the risk of health and environmental issues associated with the etching and annealing process. VECTOR EXTREME is built on the DRAM600 CE platform which provides reliable operation and scalability for a wide variety of applications. This platform offers redundancy to ensure reliable operation in the most challenging and hostile environments. It is RoHS compliant and can be integrated with other component-producing systems to create a complete machine that can provide fast and reliable manufacturing for a variety of semiconductor and industrial applications. Vector Extreme is a high-performance etching and annealing tool that provides customers with incredible precision and repeatability in a reliable and cost-effective package. Its flexibility, accuracy, and complete package makes it the perfect solution for any etching and annealing operation.
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