Used LAM RESEARCH / NOVELLUS Vector Extreme #9301496 for sale

LAM RESEARCH / NOVELLUS Vector Extreme
ID: 9301496
Wafer Size: 12"
Vintage: 2007
PECVD System, 12" Silane 2007 vintage.
LAM RESEARCH / NOVELLUS Vector Extreme is an etcher/asher designed with proprietary process control algorithms, offering optimal etch/ash performance for advanced memory devices. This equipment is compatible with the latest generations of photomasks and can handle materials including silicon, low-k dielectrics and III-V materials. NOVELLUS Vector Extreme features a novel analyzer application to identify and characterize etch/ash processes. This includes a patented analyzer window that lets users precisely determine the optimal etch/ash parameters. It also includes an advanced Active Gas Control System that monitors plasma performance and adjusts gas flow rates to optimize the etch/ash process. LAM RESEARCH VECTOR EXTREME works through plasma assisted etching, which uses a chemically reactive gas mixture to etch away layers of material. Its cutting-edge plasma source produces a high-power plasma to ensure a smooth, consistent etch/ash process. Its rapid cycle time allows high-volume production in less time, while its low-k reflow technology ensures the best possible etch/ash performance with minimal damage from thermal expansion and shrinkage. LAM RESEARCH Vector Extreme also features novel Predictive Performance Unit technology that enables users to input a desired pattern and accurately predict the etching and ashing results prior to processing. This machine learns from past etch/ash steps to fine-tune processes for better performance. LAM RESEARCH / NOVELLUS VECTOR EXTREME has been designed for maximum processing speed and accuracy. It features a large processing chamber, allowing for simultaneous etching and ashing of multiple wafer batches. It can also be connected to other tools to improve the throughput and utilization of the tool. Vector Extreme is fully automated and features integrated security and safety systems. It supports remote monitoring, alerting, and remote diagnostics. It is also capable of automatically updating itself with software fixes, ensuring the highest possible performance throughout its lifetime.
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