Used LAM RESEARCH / NOVELLUS Vector #9235071 for sale

LAM RESEARCH / NOVELLUS Vector
ID: 9235071
Wafer Size: 12"
Vintage: 2004
CVD System, 12" 2004 vintage.
LAM RESEARCH / NOVELLUS Vector is an advanced multi-functional etcher-asher equipment designed to accurately and efficiently etch and pattern various materials. The system utilizes a combination of hardware and software components to control the processing and to maintain the desired process parameters. The hardware consists of a mainframe, computer workstations, power supplies, programmable air supply monitors, vacuum and gas regulators, an ultra-high vacuum source, and multiple processing chambers. The software suite allows users to develop a set of instructions to control the processing and to fine-tune the etching process. NOVELLUS Vector uses reactive ion-beam etching technology, which is a method of etching where an ion beam is used to vaporize molecules from the target material. The ions in the beam are accelerated toward the target, where they are absorbed in its surface and then released into the gas environment of the etch chamber. The reactive ions in the gas react with the material, resulting in the desired pattern or shape from the target material. The control unit allows users to set specific process parameters, such as gas flow rate, pressure, and temperature, that will result in the necessary etch depth and width. When etching high-resolution patterns on materials, LAM RESEARCH Vector machine makes use of a lithography chamber, where a pattern or mask is placed on the substrate and exposed to a high-powered laser. The substrate is moved under the laser in a precise pattern, which is determined by the program instructions from the control tool. Once the pattern is exposed, the reactive plasma etching process is used to etch away the unprotected areas of the substrate. Vector asset can etch substrates with x-y resolutions of up to 50 nanometers or more, depending on the material and substrate characteristics. LAM RESEARCH / NOVELLUS Vector model has multiple safety features to help protect the operators and those in the immediate vicinity of the equipment. This includes protective housing around the equipment, alarms, and safety interlocks that will halt the process if conditions outside the safety limits are detected. NOVELLUS Vector is a reliable system and has been a proven workhorse for various applications, from top-layer metallization to 3-D structures. It is an efficient and cost-effective choice for etching and processing of materials for many industries.
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