Used LAM RESEARCH / NOVELLUS Vector #9235073 for sale

LAM RESEARCH / NOVELLUS Vector is an asher / etcher for semiconductor applications. It is a powerful tool that offers advanced plasma etch technologies and a modular architecture that provides both flexibility and scalability. NOVELLUS Vector utilizes a high-efficiency multi-magnetron source to achieve optimal plasma profile uniformity. Its three-chamber architecture enables quick wafer process side (HDP-PR) changes. LAM RESEARCH Vector's high-speed electrostatic chuck (ESC) wafer handling equipment allows for improved etch uniformity and throughput. The ESC system also incorporates a tilt mechanism that allows for improved wafer parallelism during large-area etching. Vector also features a comprehensive Endpoint (EPD) detection unit that monitors variability in etch rate and endpoint accuracy. To improve CHF3 etch rate and selectivity, LAM RESEARCH / NOVELLUS Vector employs an advanced gas production machine that includes a gas introduction manifold and fast-pulsing type gas shutters. NOVELLUS Vector's automated gas panel programming tuning ensures that optimal etch processes can be quickly applied. LAM RESEARCH Vector's CCD-based vision tool, from both the top and bottom surfaces of the wafer, has high identification accuracy and resolution. This dual-view CCD asset provides an accurate etch position and etch area measurement for both front- and back-etches. Vector also includes a robust model monitoring capability that allows for quick maintenance and environmental data collection and analysis. Additionally, LAM RESEARCH / NOVELLUS Vector provides advanced hardware and software levels of diagnostic capabilities, including a wide range of external diagnostics. This gives users the capability to identify and solve any process issues quickly. NOVELLUS Vector has been successfully deployed in a broad range of lithography, etch, and deposition processes. By utilizing LAM RESEARCH Vector's advanced features, users can utilize the etcher for both complex and simple processes in high-volume production lines. Vector provides customers with ultimate flexibility, high throughput, and improved process control.