Used LAM RESEARCH / NOVELLUS Vector #9235161 for sale

LAM RESEARCH / NOVELLUS Vector is an etching/ashing tool (or Chemical Mechanical Planarization (CMP) equipment) used for processing semiconductor wafers. It is designed for high throughput performance with a wide range of process modules that can be easily integrated into a production line. NOVELLUS Vector features a two-stage process. In the first stage, an oxidizer and an etchant are used to remove the top layers of the wafer. In the second, a high-density plasma (HDP) is used to etch the surface at a much higher speed and higher resolution than conventional wet chemical processes. LAM RESEARCH Vector system is designed for maximum optimization of process efficiency and uptime. It features a linear processor that can decrease negative effects on process performance and speed. It is capable of controlling process conditions with adjustable parameters, which allows for greater flexibility in process parameters. Vector also features a unique enclosure unit that provides a cleaner process environment, allowing for higher fidelity results. Furthermore, LAM RESEARCH / NOVELLUS Vector uses a single wafer approach, which eliminates the need for batch processing. NOVELLUS Vector's state-of-the-art measurement and control capabilities are also impressive. It features a dual-stage process monitor that improve process control and process stability when etching different layers. It also includes advanced automated alignment to ensure uniformity across the wafer. Additionally, LAM RESEARCH Vector comes with an automated analyzer, which can monitor the etching process and provide feedback for process optimization. Overall, Vector is an advanced etching/ashing machine designed for high throughput performance. Its innovative design allows for maximum process efficiency and uptime, as well as advanced measurement and control capabilities. It is an ideal tool for the semiconductor industry and can provide a competitive edge to any wafer processing facility.