Used LAM RESEARCH / NOVELLUS Vector #9235239 for sale

The LAM LAM RESEARCH / NOVELLUS Vector is an etching or ashing tool used in semiconductor manufacturing. NOVELLUS Vector is designed to not only perform etching or ashing applications but to also optimize a complete process workflow. The equipment incorporates capabilities for precise dielectric etching and oxide deposition for high-quality device processing. With a modular, compact design, LAM RESEARCH Vector enables fast, repeatable processes for small production runs. It is extremely reliable, with high levels of foundry performance and throughput. The system offers excellent uniformity and precision with very tight process windows, making it the ideal tool in a range of process recipes, including high K dielectric etching , local interconnect etch or copper gap filler etch applications. Additionally, Vector's robust processing capabilities make it an optimal tool for volatile materials, like high-K dielectric etch or deposited oxides, within the service cluster. LAM RESEARCH / NOVELLUS Vector integrates NOVELLUS Vector control and a unique beam plasma source to enable superior etch-rate control, uniformity, and precision. The unit also features enhanced process automation, enabling fast responses to changing production plans. It offers robust process security features to deter potential saboteurs, and its advanced tunnel- and slide-bar design offers enhanced throughput and yield performance. With its expanded integration of process management tools, LAM RESEARCH Vector offers maximum flexibility and control over key processing parameters. Vector also incorporates advanced process control features to ensure optimal process accuracy and uniformity. It includes universal recipe management and advanced process metrology capabilities. The metrology capabilities provide a wide range of parameters to ensure process accuracy and uniformity. The machine offers quick programmability for fast, repeatable process optimization and high productivity. In addition, LAM RESEARCH / NOVELLUS Vector features a range of safety features to protect operators and critical equipment from potential hazards. The tool utilizes a combination of containment and laser-safe technologies to ensure a safe wafer-processing environment. Finally, NOVELLUS Vector is designed with intuitive user experience in mind, making it easy to program and operate.