Used LAM RESEARCH / NOVELLUS Vector #9244820 for sale

ID: 9244820
Vintage: 2009
CVD System Front PC Chase PC Transformer Part box 2009 vintage.
LAM RESEARCH / NOVELLUS Vector is an all-in-one etcher/asher specifically designed for processing the most challenging, cutting-edge technologies that require precise, reliable etching and/or ashing. NOVELLUS Vector utilizes a Revolutionary Automation Control Equipment (RACS) to ensure that each process is controlled for critical specifications. This ensures uniform and repeatable etch and ash results for every cycle. LAM RESEARCH Vector is equipped with a quiet, low-vibration, particle-controlled, vacuum system and a highly efficient remote plasma source that enables faster processing. It features a fast, precise stepper and galvanometer-based integrated motion control unit to reduce etching time while maintaining a high level of accuracy, as well as a modular, robotic-type end effector that greatly increases etch rates and yields. Vector is also equipped with a powerful, yet extremely accurate beam alignment machine to ensure tight tracing characteristics on even the most intricate patterns. LAM RESEARCH / NOVELLUS Vector is equipped with advanced safety systems to ensure that all sensitive components remain undamaged and that personnel are always protected. It has a powerful illumination tool that allows for easy pattern viewing during operation, as well as a real-time process monitoring asset that can be used to check for tool damage and contamination. NOVELLUS Vector is also equipped with a trend analysis and data logging module to ensure that every layer is etched according to the predetermined specifications. LAM RESEARCH Vector's flexibility makes it suitable for a wide variety of etching solutions. Its easy-to-use graphical user interface (GUI) and integrated networking capabilities make it simple to configure and transfer jobs from one tool to another. Vector's open architecture design ensures that it is completely compatible with all available software from a variety of vendors. This allows the user to configure and set up custom process sequences and layer combinations, as well as to integrate existing job sets from any other model. In addition, LAM RESEARCH / NOVELLUS Vector is capable of performing a variety of task-specific functions, such as biasing, ion milling, deep screening, carbon nanotube etching, and high aspect-ratio etching. The equipment is designed to provide a very low cost of ownership. By using a single platform and an integrated chamber, it is possible to reduce investment costs and improve process yield. Finally, NOVELLUS Vector is one of the most reliable and cost-effective systems on the market, making it an ideal solution for any business wanting to take their etching and ashing to the next level.
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