Used LAM RESEARCH / NOVELLUS Vector #9244876 for sale
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ID: 9244876
Vintage: 2003
CVD System
Chase PC cart
NPP Rack
NTU
AC Rack
(2) Light curtains
2003 vintage.
LAM RESEARCH / NOVELLUS Vector is an etcher / asher equipment designed to be used in the semiconductor industry. It is a high performance system designed for wafer fabrication applications. The unit is designed for high volume production lines, providing precise and reliable plasma etching and ashing processes. It has an advanced single-wafer substrate processing station, with an ergonomic user interface and is capable of handling a wide variety of wafer sizes and filtering gases. NOVELLUS Vector machine uses a unique chemical vapor deposition (CVD) process to etch and clean semiconductor surfaces. The CVD process uses a combination of gases, in a tightly controlled environment, to deposit thin layers of material over the surface of the wafer. This process results in a higher quality interface between the wafer and the substrate, with smoother surfaces and fewer defects. The tool features a modular design, allowing for easy scalability and incorporation of new capabilities. Its advanced gas control asset provides superior stability and control of process parameters while minimizing down time. This model also offers an independent heating control equipment, which allows for greater control over process temperature stability. The system features a versatile hardware configuration, with multiple optical components for high-resolution imaging, as well as a uniform deposition module for consistent results. The unit also has an array of sensors for process monitoring and control, helping to maintain the process efficiency and quality. LAM RESEARCH Vector machine has several distinct advantages over competing systems, such as its large operating range and high throughput. Additionally, its advanced capabilities for substrate processing and deposition make it ideal for a variety of semiconductor fabrication applications. Finally, its flexible design allows for easy integration with various types of production lines and processes.
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