Used LAM RESEARCH / NOVELLUS Vector #9250686 for sale

LAM RESEARCH / NOVELLUS Vector
ID: 9250686
Wafer Size: 12"
Vintage: 2005
CVD Systems, 12" 2005 vintage.
LAM RESEARCH / NOVELLUS Vector is an etcher / asher designed to etch a variety of material surfaces. This etcher / asher is created to aid in a variety of industrial applications, from mobile device parts to computer memory chips. NOVELLUS Vector etcher/ asher uses dual-beam source technology to maximize both blank and etched depth of materials. This dual-beam technology is not limited to etching materials, but also simultaneous layer deposition. LAM RESEARCH Vector is designed for both semi-atemperate and temperate process chambers, and has an array of process susceptors in the coater-developer in which users can place substrates, such as memory chips and metal layers, for precise etching and developing processes. With its advanced dual-beam source technology, Vector heats up substrates to temperatures ranging from approximately 1200°C to 2400°C for etching or layer deposition processes. LAM RESEARCH / NOVELLUS Vector utilizes a single transfer robot within its sealed chamber, which is capable of transferring thousand of substrates per hour with minimal human interaction. Its beam source helps create extremely small openings with high accuracy, and its dual beam technology helps helps minimize waste and preserve materials. NOVELLUS Vector is best used for processing wafers of between 8" and 12" in diameter, and is capable of handling complex process tasks, such as oxidation, nitridation, metallization, annealing, nitriding, and low-temperature diffusion. Its automated process and sophisticated laser source technology ensures accurate and precise etching, with minimal human interaction. Overall, LAM RESEARCH Vector is an etcher/ asher designed for high-quality etching and precision layer depositing for a variety of materials. Its dual-beam source technology and its single transfer robot inside a sealed chamber make it able to handle complex process tasks, and its tiny beam opening leads to high-accuracy etchings. Vector is designed for Wafers of between 8" and 12" in diameter and can process substrates with precision and efficiency.
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