Used LAM RESEARCH Rainbow 4520i #293622809 for sale

LAM RESEARCH Rainbow 4520i
ID: 293622809
Wafer Size: 8"
Etcher, 8" Bulkhead Hine indexer Isotropic chamber with ADVANCED ENERGY AxZ match ADVANCED ENERGY RFG 1250 ISO RF Generator (2) Gas line ISO chambers Perimeter lift ceramic ESC ADVANCED ENERGY PDW 2200 Main chamber RF generator (6) Gas lines main chambers RF Cart Remote power module.
LAM RESEARCH Rainbow 4520i is a high-performance etcher/asher designed for applications such as direct write and 3D device fabrication. It offers a number of features, such as a high-resolution stepper, wide wafer size range, and a large library of recipe sets, which make it an ideal choice for many industries. Rainbow 4520i utilizes an advanced stepper design, featuring a large number of positioning points and an efficient drive equipment. This allows for a high accuracy and quick positioning over the entire surface of a wafer. The stepper is capable of producing patterning with micron-level resolution and can precisely etch or ash both standard and complex geometries into the surface of the wafer. The system is also equipped with a Laser Alignment Unit (LAS), which automatically aligns the wafer before each processing step for highest accuracy. The machine comes with a wide range of wafer sizes, with a maximum of up to 13-inch diameter. It can handle substrates of different thickness, materials such as silicon, quartz, or ceramics, and also multiple wafers at once. In addition, LAM RESEARCH Rainbow 4520i features a large number of recipe sets in order to quickly adapt the process parameters to the requirements of the application. Rainbow 4520i is powered by LAM RESEARCH flexFAB software, which offers a user-friendly graphical interface and real-time video monitoring of the etch/ash process. The software is designed to make it easy to set up and store recipes, acquire data about the status of a process, calibrate the tool for higher accuracy, as well as customize the process parameters for a range of materials. The software also offers a number of asset diagnostics, such as examining the quality of the pattern, over etching, and environmental data logging. LAM RESEARCH Rainbow 4520i is a versatile, high-performance etch/ash model designed to meet the requirements of advanced device fabrication. Featuring a high-resolution stepper and a wide range of process parameters, Rainbow 4520i is capable of producing superior results in both standard and complex geometries. It also comes packed with a number of innovative features and a user-friendly graphical interface for a simplified process control. The equipment is ideal for a range of industries, from semiconductor to optical device manufacturing.
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