Used LAM RESEARCH Rainbow 4520i for sale

Etchers / Ashers

Manufacturer

LAM RESEARCH

Model

Rainbow 4520i

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Oxide dry etcher.

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Etcher With isotropic etch module Currently de-installed.

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Dry etcher Currently installed.

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Dry etcher, 6" Clamped chuck Verity enhanced endpoint detection Hines indexers Matching network: LoF

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Etcher, 8" Bulkhead Hine indexer Isotropic chamber with ADVANCED ENERGY AxZ match ADVANCED ENERGY RF

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Etcher, 8" 1996 vintage.

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Dry etcher, 8" SMIF Type Process kit MFCs: ESC UPC.