Used LAM RESEARCH Rainbow 4520i #9189899 for sale

ID: 9189899
Dry etcher Currently installed.
LAM RESEARCH Rainbow 4520i is a high-performance, wet-etch etching Equipment used for advanced processing in the semiconductor industry. It is a highly efficient, user-friendly, cost effective and versatile etching system. Rainbow 4520i features a function-specific, automated processing station providing precise temperature control for a wide range of high-value semiconductor devices. The unit features comprehensive process and recipe management capabilities, enabling quick and easy set up and recall of pre-defined and customized recipes. This includes multi-step recipe development from selectable paramaters, as well as on-site recipe editing/design. In addition, the Rainbowi series has CCD slice-by-slice monitoring capabilities, providing real-time quality assurance. LAM RESEARCH Rainbow 4520i machine has a robust, stainless steel, front loading chamber with dual process gas valves and integrated RF generator. The vacuum chamber is designed for smooth and reliable operation in both etching and depositing processes, and the pressure is precisely controlled using an in-situ pressure gauge. The chamber lid is equipped with predefined air-cooling and heating systems, enabling quick and efficient temperature ramp-up and ramp-down rates. The RF generator provides high-frequency energy necessary for etching processes; power levels, frequency, and tuning can be selected as needed. Rainbow 4520i also incorporates an entire suite of safety features, with automatic temperature control for precise etching control, fully interlocked process chamber with integral safety and alarms, and an integrated diagnostics tool for real-time trouble shooting. In addition, the asset includes an on-site sequence editor and monitor, enabling engineers to make real-time adjustments to the parameters and track the process during development. LAM RESEARCH Rainbow 4520i is a fully integrated etching model for advanced semiconductor device processing. With its robust, intuitive design and comprehensive process and recipe management capabilities, Rainbow 4520i delivers productive, reliable, and cost-efficient results.
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