Used LAM RESEARCH Rainbow 4520i #9114147 for sale

Name: LAM RESEARCH Rainbow 4520i
Brand: LAM RESEARCH
SKU: 9114147
Availability: SoldOut

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Etchers / Ashers

Manufacturer

LAM RESEARCH

Model

Rainbow 4520i

ID: 9114147

Wafer Size: 8"

Etcher, 8" SMIF Isotropic chamber (26) Slots Chamber: Single chamber with variable gap electrode Main chamber: (6) Gases RF Generator model: PDW-2200 RF Power supply: 2.2 kW & 400 kHZ Isotropic chamber: (3) Gases RF Generator model : RFG1250 RF Power supply: 1.2 kW & 13.56 MHz Automatic match system (LOFAT) ISO Chamber matcher (AE Matcher AZX 10) Electrode temperature unit interface Endpoint detector: Monochronometer ASS’Y ELCTD,ESC,8”,SEMI: 839-440462-308 (High resist ESC) Semi open loop back HE cooling OBITAL Gas box configuration XLL Wafer detector sensor Remote interface Viton O-ring N2 Ballast Kit Standard clean gas box Remote AC control box Wafer transfer: Cassette to cassette (Hine 38A indexer) Pick & place single wafer transport with non contact wafer alignment & flat zone orientation System controller: ENVISION E1.5.2 Control system with LCD Monitor Pressure control: Automatic pressure control AC-2: Main chamber / Isotropic chamber Process gas configuration: Standard clean gas box with 9 MFC's for reaction Make Model Gas Full scale MILLIPORE FC-2900V Ar 1000 MILLIPORE FC-2900V CF4 100 MILLIPORE FC-2900V CHF3 100 MILLIPORE FC-2900V He 1000 MILLIPORE FC-2900V O2 500 MILLIPORE FC-2900V N2 100 MILLIPORE FC-2900KZ NF3 1000 MILLIPORE FC-2900V He 500 MILLIPORE FC-2900V O2 100 Main frame / System controller: (2) Indexers line 38A (853-012600-101, 853-012600-102) ISO Chamber top gatch (AE Matcher AZX 10) 660-021964-001 Process chamber: ESC 8" Notch, ceramic 839-440462-308 Electrode, silicon, hi temperature, polish, 8" 839-011907-913 Remote frame: Chiller: SMC INR-497 Pump: AA70W (2) AA40W Power requirements: Etcher: 208 V, 3 Phase, 30 A, 5 Wires RF Cart: 208 V, 3 Phase, 50 A, 5 Wires 1995 vintage.

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LAM RESEARCH Rainbow 4520i etcher / asher is a highly advanced and reliable piece of equipment used in the manufacturing process for creating circuit boards. It is designed to precisely and accurately etch and asher critical components. Rainbow 4520i utilizes revolutionary new technology to ensure a consistent and reliable etch or asher of wafers. The etch/asher process is necessary to create small structures and features on wafers. LAM RESEARCH Rainbow 4520i features a high energy chlorine dioxide (ClO2) chemistry delivery equipment that offers superior etch rate, surface selectivity, uniformity, and edge profile quality. This system eliminates the need for many etch-back processes, allowing the process flow to be improved, and lets it remain cost effective. The etcher / asher is equipped with a high-precision optical subsystem that allows users to tightly define the processing area. The optical subsystem also features high levels of energy control and contains adjustable pressure nozzles for further process optimization. To ensure maximum productivity, Rainbow 4520i also contains an automated wafer exchange unit and auto-load feature to expedite the processing steps. LAM RESEARCH Rainbow 4520i comes with a user-friendly graphical interface that provides a simple and intuitive way to manage complex etch and asher processes. The easy-to-use graphical interface allows users to quickly set up and adjust the wafer process parameters for optimal results. To further enhance productivity, Rainbow 4520i is equipped with an automatic selectivity compensation feature, which optimizes process parameters to ensure the best possible results. Additional features of LAM RESEARCH Rainbow 4520i include a built-in feature to assist in tracking process data, determine results quickly and accurately, predict future throughput, and adjust recipes as needed. For added user convenience, the machine also includes a standard USB port, which allows it to be connected directly to a computer or network. Overall, Rainbow 4520i etcher/asher is a superior tool to achieve superior results in etching and ashing critical components. It's powerful capabilities, intuitive user interface, and advanced automation make it an industry leader in etch and ashing technology.