Used OXFORD Plasmalab 133 #9256926 for sale

OXFORD Plasmalab 133
ID: 9256926
PECVD Systems.
OXFORD Plasmalab 133 is an etcher/asher designed to etch and ash surfaces, including those of integrated circuits, worn tools, ferrous and non-ferrous materials and precious metals. It is equipped with an advanced patented programmable digital control equipment and a powerful high frequency generator, allowing for precise and consistent process control and repeatability from batch to batch. Plasmalab 133 uses a combination of electrical bias, etching chemistry, and reactive gas to etch or ash the surface to be processed. The electric bias creates a electric field which ionizes the processing gas, forming a plasma. This plasma, combined with the etching chemistry, is then used to create and maintain a desired profile on the substrate surface. The chemistry and gas can be altered to suit the specific application. OXFORD Plasmalab 133 offers a wide range of process parameters to achieve different results and offers good process stability. It is equipped with a unique gas distribution system that optimises etching uniformity and process acceleration. The chamber is designed to reduce maintenance operations and comes with two high-performance vacuum pumps. This allows the user to quickly alter the vacuum level, depending on the application, resulting in enhanced process control. Plasmalab 133 comes with an intuitive operator set-up screen and graphical operators interface for rapid and easy unit and process control and monitoring. It has the latest in safety and environmental protection systems. It is designed to be fully encased and minimise chemical exposure and provide a safe working environment. OXFORD Plasmalab 133 is a reliable and efficient etching and ashing machine suitable for a wide range of applications. It features excellent repeatability and a wide range of process parameters, making it an ideal choice for industrial, laboratory and educational applications.
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