Used OXFORD Plasmalab 133 #9404282 for sale

ID: 9404282
PECVD System.
OXFORD Plasmalab 133 is a high-performance plasma asher designed for the etching, cleaning, and surface modification of all types of substrates. It is an all-in-one tool which makes it an ideal choice for use in cutting-edge research, development and production applications. The machine is a user-friendly tool, easy to set-up and operate. Plasmalab 133 has a compact, bench-top design and is constructed from stainless steel to provide excellent performance and reliability. It has an integrated pressure controller, adjustable temperature gauge and PID digital display that allows for precise control over the etching process. It utilizes RF power to create a high-density discharge of active species, which can be tuned to get up to 10 mTorr chamber pressure. With its adjustable repeatable power output, the machine can etch to an accuracy of 1 micron in a wide variety of materials and substrates. OXFORD Plasmalab 133 is capable of operating in batch mode or continuous etching. It has a high temperature tolerance of up to 350 °C and can etch a thickness of up to 0.25 microns. The machine can also be operated in a Reactive Ion Etching (RIE) mode. The RIE mode is useful for etching complex patterns, such as 3D-structuring. Plasmalab 133 also comes with two gas feeds, O2/CF4, for precision control over the etching process. To ensure safety, OXFORD Plasmalab 133 comes with a built-in safety interlock. The machine also has a vacuum leakage detection system which will shut off the power supply in the event of a vacuum leak. The vacuum chamber is designed to work with standard cryopumps, so the vacuum can be reliably maintained throughout the entire etching process. Plasmalab 133 is an ideal tool for any application requiring accurate plasma etching. With its user-friendly design, ease-of-use, and high-performance capabilities, it is a perfect choice for a variety of tasks in both research and production.
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