Used OXFORD Plasmalab 800 Plus #293606951 for sale

OXFORD Plasmalab 800 Plus is an advanced, high-precision optical mask aligner etcher and asher. It is designed for use in the production of microelectronic devices and photonic components. Plasmalab 800 Plus provides a versatile tool for mask aligner applications, allowing users to etch, reactive ion etch, asher and clean integrated circuit layers with a single equipment. OXFORD Plasmalab 800 Plus is designed with a large process chamber, which allows for prototyping and production of devices that utilize optical mask-alignment techniques. The chamber is capable of etching, reactive ion etching (RIE), ashing, vacuum deposition, and other processes within a controlled vacuum environment. The optical mask aligner employs a full-circle slavable mirror scanning mechanism, providing stable, high-resolution alignment of optically patterned masks with the etched substrate. In addition, the system also utilizes a powerful wafer boat, allowing for quick and accurate positioning of substrates and masks. In addition to the basic mask alignment and etching capabilities, Plasmalab 800 Plus also provides advanced features. The unit features a controlled RIE process to ensure uniformity of etched features across the substrate. The machine is also capable of tightly controlled ozone, oxygen and nitrogen based cleaning processes, allowing users to clean and process devices with a single tool. In addition, the asset also allows users to partially etching process layers with etching selectivity. Finally, OXFORD Plasmalab 800 Plus utilizes an intuitive user control model, allowing users to quickly program a variety of process parameters and monitor the etching process in real-time. These features allow for fast, efficient and cost-effective production of devices utilizing optical masking technology.