Used OXFORD Plasmalab 800 Plus for sale

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Manufacturer

OXFORD

Model

Plasmalab 800 Plus

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PECVD System Missing parts: Gasbox Computer missing.

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PECVD System Gas configuration: NH3 50 SCCM SiH4 5% N2 95% 1SLM N2O 200 SCCM N2 2000 SCCM CF4 80%

RIE PECVD System.

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