Used OXFORD Plasmalab 800 Plus #9250156 for sale

OXFORD Plasmalab 800 Plus is an advanced etcher and asher specifically designed to achieve repeatable etch rates and an evenly etched surface, even on surfaces with challenging geometries. Plasmalab 800 Plus is powered by a Power Source, which delivers high-performance, low-noise plasma to the process chamber. The system also features an advanced optical sensor, which enables efficient detection, measurement, and analysis of open-circuit potential and reactive deposition rate, enabling the user to precisely control the etching process. OXFORD Plasmalab 800 Plus has an intelligent software-controlled process chamber with a wide range of process parameters, creating conditions for safest and most efficient material etching, with an integrated Vacuum pump, water cooling, and oil mist recovery systems. It is able to etch a variety of delicate materials largely used in microelectronic applications, including silicon and gallium arsenide. In addition, Plasmalab 800 Plus has a global shutter which allows for in-situ shutter control, providing flexibility for each period of etching. The AC output of the power supply is adjustable from 0 to 100%, providing full control over the process. The effective vertical gap of the etch chamber has a 0.2mm tolerance. The three main etching methods supported by OXFORD Plasmalab 800 Plus are planar etching, raster etching, and blind etching. Both planar and raster etching require an X, Y and theta coordinate scan. For blind etching, the theta scan is replaced by a single point measurement. The planar etching method is best when etching layers with higher aspect ratios, while the raster etching is best used on dense layers with small aspect ratios. Blind etching can be used for layers with large aspect ratios and high aspect ratio layers with no fine features. The safety of the user is ensured by three main safety features: the Interlock system where the process chamber door will not open unless the etching process is stopped, a Leak Sensor to detect pressurized collection of particles and chemicals, and the Ultrasonic Transmitter/Receiver. All of these features ensure maximum safety during etching processes. When not in use, Plasmalab 800 Plus Auto-Save function keeps all process parameters saved, along with signatures of the etching process they produce. This feature allows the user to repeat previous etching processes with minimal effort. It also monitors the process status, enabling the user to evaluate etching performances before the start of production.