Used OXFORD Plasmalab 800 Plus #9315629 for sale

OXFORD Plasmalab 800 Plus is an etcher and asher designed to meet the demands of advanced prototyping and research nad development laboratories. It is a high performance, multi-chamber equipment capable of a wide range of etching and ashing processes. The system employs a unique dual chamber design, allowing etching in one chamber and ashing in the other. The sputter etch chamber includes a platen and up to four substrates can be mounted and fixed simultaneously, enabling high throughput etching. Using a sliding door, the substrates can be conveniently loaded, regardless of size and shape. The DI ashing chamber is designed to provide a faster and more consistent rate of oxide etching and the quartz based single side etcher is perfectly suited for the most recent generation of materials. Both chambers are operated or managed through independent, robust control systems. Plasmalab 800 Plus uses a combination of RF sources in the Plasma Chamber and DI ashing chamber. The RF sources have been carefully configured to ensure maximum efficiency, with a range of up to 485W. This enables the unit to handle thin, delicate substrates without sacrificing performance. OXFORD Plasmalab 800 Plus features a multi-language, intuitive user interface that allows customers to easily control the machine, with direct access to etching chambers, recipes, tuning parameters, process timing and RF parameters. A selection of pre-programmed recipes can be accessed, allowing customers to fine-tune the results in order to meet the demands of their specific application. Plasmalab 800 Plus was designed with safety in mind and comes with interlocks, shielding and safety systems to ensure operator safety at all times. All components are designed to conform to current CE and FCC regulations. The tool also has integrated vacuum diagnostics and remote access capabilities. OXFORD Plasmalab 800 Plus is an ideal choice for precise, efficient and safe etching and ashing processing. The advanced features, robust design and intuitive software make it an essential tool for any advanced prototyping or research and development laboratory.