Used OXFORD Plasmalab 800 Plus #293615031 for sale

OXFORD Plasmalab 800 Plus is an industry leading etcher/asher designed to provide both high-speed and accuracy for the production of industrial, research and development etching and ashing projects of all kinds. The machine consists of a plasma chambers, a lid elevator, and open-end, closed- end and ion beam sources with power supplies, a digital controller and RF generator unit, a remote interface and a plasma process chamber. The plasma chamber is made from a highly resistant ceramic-based material which is capable of withstanding plasma and temperature up to 180°C. This combined with an integrated lid elevator enables optimized plasma chamber access and complete sample loading and unloading of substrates up to 200mm in diameter. The control panel, capacitive sensors and other safety features ensure that the unit can be operated safely in a fully automated mode. The etcher/asher uses advanced nitrogen-enriched plasmas and ion beams in conjunction with unique pulse power technology. This combination of technologies thus enables total control of etching and ashing process parameters such as temperature, pressure, time and power. The digital controller and RF generator also feature programmable values and diagnostics for endpoint detection which allows for precise etching and ashing results, even on the most delicate substrates. The open-end and closed-end sources feature loads up to 50 W and process chambers up to 6 inches in diameter. The ion beam sources feature beam energies up to 15keV and power supplies of up to 50A per unit. The process cycles are programmable up to 100 sequential processes and can be stored for future use. The remote interface allows the remote control of all machine operations and process parameters, ensuring quick and easy setup of the etcher/asher, as well as a higher level of reproducibility and precision. Overall, Plasmalab 800 Plus etcher/asher is an advanced, high-performance tool providing a reliable etching and ashing process for industrial and research purposes. The etcher/asher offers superior automation and precision, enabling consistent and high-quality results with reliable repeatability and consistent results. With its intuitive, easy to use and yet highly versatile design, OXFORD Plasmalab 800 Plus is a reliable, innovative and self-sufficient etcher/asher for all your etching and ashing requirements.