Used OXFORD Plasmalab 800 Plus #293620207 for sale
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ID: 293620207
PECVD System
Gas configuration:
NH3 50 SCCM
SiH4 5% N2 95% 1SLM
N2O 200 SCCM
N2 2000 SCCM
CF4 80% O2 20% 500 SCCM.
OXFORD Plasmalab 800 Plus etcher/asher is a high performance, cost-effective etching and ashing equipment designed for applications in the microelectronics and research industries. Its large working volume of 7.5 liters allows users to etch and asher up to four wafers at a time, while the low base pressure of 3 mTorr makes it suited to a variety of etching and ashing processes. Plasmalab 800 Plus features an advanced electronics system with an intuitive user interface, allowing users to configure and tailor their etching and ashing processes. This includes a recipe editor that enables users to set up their etching and ashing parameters and tune them to specific requirements. The integrated mass flow controllers in the unit ensure that the gas flow is always added in proper ratios and with the right purity. OXFORD Plasmalab 800 Plus offers a variety of etching and ashing chemistries for a range of applications including oxide etching, passivation, and activation. Its three-chamber design allows for a variety of etching configurations, with several process options including inductively coupled plasma source and glow discharge source. In addition, the machine offers a variety of other useful features, such as an eyesafe laser source for wafer alignment, a manual source for sample alignment, and a dedicated ashing chamber. The tool can be operated in a fully automated mode with OXFORD Plasmalab IC software, which provides users with complete control of their etching and ashing sequences. The software enables the user to set up their own recipes and monitor the process in real-time, with a variety of alarm and safety features that can be customised to their needs. Overall, Plasmalab 800 Plus provides users with a reliable and cost-effective way to etch and asher their materials with precision and accuracy. Its advanced features, intuitive user interface and automated capabilities make it an excellent choice for many applications in the microelectronics and research industries.
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