Used PLASMATHERM / UNAXIS Versaline #293817395 for sale

PLASMATHERM / UNAXIS Versaline is an etcher/asher designed for dry etching by plasma etching. It is capable of etching and ashing substrates for diverse semiconductor device processing applications. This equipment is tailored for the aerospace and automotive electronics industry and is a powerful dry etching tool for complex 3D features of various size geometries. It provides precise patterning, superior uniformity and increased throughput by using its versatile plasma source to ensure optimal etching results. UNAXIS Versaline features a 5.9"-wide multi-level plasma source, which enables the etching process to be precisely controlled, allowing for precise nano-patterning, as well as high-aspect-ratio etching. The plasma source utilizes argon as the etching gas, which is capable of both O2 and CF4 plasma etching. This allows for etching of different types of materials with varying etching rates. Additionally, PLASMATHERM Versaline's advanced robot arm technology combined with its auto-loading/unloading equipment provide an automated production solution and eliminates many manual processes, increasing throughput and overall system productivity. Versaline has an integrated cleaning unit which utilizes both a de-ionized water rinse and a dry-off technique to ensure that the substrate surfaces are clean after the etching process. Additionally, it has a surface treatment chiller module to aid in the ashing process. PLASMATHERM / UNAXIS Versaline's monitoring machine features an advanced data acquisition tool for real-time monitoring and analysis of the etching and ashing processes to ensure optimal results. This asset includes a graphical user interface that allows for easy operation, as well as a high-resolution camera with motion control to monitor the process during etching and ashing. UNAXIS Versaline has a robust safety model to ensure proper operation. This equipment includes emergency stops, exhaust valves, optical and electrical safety sensors, and an alarm and state indicator. Additionally, the system is equipped with a reduction of emission control unit which drains unwanted gases from the machine to ensure a clean work environment. PLASMATHERM Versaline is a powerful and flexible etcher/asher ideal for the microelectronics industry. It can provide excellent results due to its advanced plasma source and automated loading tool, and its integrated safety asset ensures that the etching process is done in a safe manner. It is perfect for applications that require complex 3D features or nanoscale features and offers improved throughput and uniformity.