Used PLASMATHERM / UNAXIS Versaline for sale
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Popular Product
PLASMATHERM / UNAXIS
Versaline
Etcher, 6" Materials: GaN, GaAs Rate: GaN: 5400 A/min GaAs: 3.15 µm/min Selectivity: GaN: AZ4620 =
52
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Popular Product
PLASMATHERM / UNAXIS
Versaline
Etcher, 6" Gate recess etching Rate: 200 A/min (8) Gas lines 2005 vintage.
54
Popular Product
PLASMATHERM / UNAXIS
Versaline
Etcher, 6" Material : AuTiPt E/R=1200 A/min (Au) 1000 A/min (Ti) 800 Amin(Pt) Selectivity= 1.1:1 (AZ
40
Popular Product
PLASMATHERM / UNAXIS
Versaline
Etcher, 6" Materials: SiO2: PECVD TEOS Dry / Wet thermal HDPCVD SiNx: PECVD LPCVD HDPCVD Rate: 10
60
Popular Product
PLASMATHERM / UNAXIS
Versaline
ICP Etcher, 6" Cassette type: Loadlock and transfer chamber, 6" ESC Chuck type: Process chamber, 6"
35
