Used PLASMATHERM / UNAXIS Versaline #293826125 for sale
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ID: 293826125
Wafer Size: 6"
Vintage: 2005
ICP Etcher, 6"
Cassette type: Loadlock and transfer chamber, 6"
ESC Chuck type: Process chamber, 6"
RF Generator module
EDWARDS STP-A1303CV Turbo pump
SKM SKMCS-30W Chiller
ENI NOVA-50 RF Generator
COMDEL DBS RF Generator
EMS 04500-011 Robot
Throttle / Gate valve: NC TPV / IPV Valve inspection
Process chamber: Vesaline DSE Process
Monitor
MKS Gases: C4F8, SF6, Ar, O2, N2
2005 vintage.
PLASMATHERM / UNAXIS Versaline is a leading etcher/asher for a range of applications, including semiconductor processing, MEMS device fabrication, photonic device fabrication and other thin-film deposition processes. UNAXIS Versaline offers high-quality etching and ashing processes with excellent repeatability and tight size control. This equipment employs the latest MEMS fabrication technologies to ensure superior uniformity and mass production readiness. Utilizing proprietary plasma technology, UNAXIS and PLASMATHERM Versaline provides superior uniformity and control, resulting in reduced substrate processing time and improved device specifications. The asher/etcher provides a high throughput, clean and cost- effective solution in a small footprint. Featuring an enclosed chamber design and a low operational noise, Versaline offers a user friendly and space saving platform. It is also certified with third party safety requirements, making it highly reliable and safe to operate. In terms of scalability, PLASMATHERM / UNAXIS Versaline is designed with a capacity of up to 150w RF power and 500mm2 processing area. With a 4-basket design, the system allows for flexible configurations for batch and single substrate processes. Furthermore, the unit is enhanced by a range of adaptive features such as optional automated load lockers, substrate alignment rovers and real time monitoring and control systems, thus enabling operators to maintain consistent product quality at all times. UNAXIS Versaline etcher/asher is also a highly customizable machine, allowing easy integration into existing process infrastructure. The tool integrates with a variety of process modules to enable efficient, automated workflow with minimal manual programming, thus maximizing asset performance and throughput. The etcher/asher is also supported by a wide range of accessories including advanced cleaning components, transport peripherals and RF matching units, allowing the model to meet any specific etching needs. Overall, PLASMATHERM Versaline etcher/asher is an ideal choice for a range of etching and ashing processes, as it offers superior performance, durability, scalability, and flexibility to provide users with the reliable, repeatable and cost-effective results they need.
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