Used STS / CPX Multiplex #9145668 for sale

Manufacturer
STS / CPX
Model
Multiplex
ID: 9145668
Wafer Size: 8"
Cluster ICP etcher, 8″ Brooks VCE4 and Mtr5 robot C033 Cluster handler (2) Temperature controlled lids Loadlock: Brooks VCE 4 with manual door Corema chiller on metal ICP chamber ICP Chamber (Metal, dielectric etch) (12) process gas manifold Bias capabilities Chuck: Heat exchanger Turbo pumps: TMH 100 Processed: Silicon etch ICT Chamber (Asher / Stripper) Gases: N2, O2, NH3, CF4 Turbo pump NOAH Chiller.
STS / CPX Multiplex is a specialized etcher/asher that is designed to help with the etching and trimming of ceramic packages and other substrates like glass. STS Multiplex is a high precision wet etching/trimming machine that can be used in a wide range of applications. It features an integrated, air-cooled vacuum equipment to achieve optimal etching and trimming results. The system can process substrates up to 18mm thick, making it ideal for etching and trimming of ceramics, glass, and other substrates. CPX Multiplex features a powerful pump unit attached to a programmable logic controller (PLC) which enables precise control of the etching and trimming process. It is equipped with an interface that allows users to further customize the machine to their specific applications. This includes setting the etching and trimming pressure, speed, and time. It also features multiple built-in safety features to ensure that the tool operates safely and efficiently. Multiplex also comes equipped with a number of state-of-the-art features that make it an ideal choice for those seeking an advanced etching and trimming solution. Its high-precision gauging asset enables the user to accurately measure the depths of each etch and trim, while its built-in alignment model ensures that the etch is always perfect. Its advanced microprocessor control equipment provides for quick and accurate data transmission between the process and the system, ensuring that the user's etch is always optimized to their exact specifications. In summary, STS / CPX Multiplex is an ideal etching and trimming machine for those looking for an ultra-precise etching and trimming solution for a wide range of applications. It features an integrated, air-cooled vacuum unit, powerful pump machine attached to a PLC, and an advanced microprocessor control tool for the ultimate etching and trimming experience.
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