Used STS / CPX Multiplex for sale
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Popular Product
STS / CPX
Multiplex
PECVD System, 4"-8" Gases: N2, N2O, NH3, SiH4, CF4, O2 Temperature range: 0-300°C EDWARDS QDP80 wit
19
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Popular Product
STS / CPX
Multiplex
ICP Etcher, 6" Type: Standard rate ASE Does not include turbo pump 1999 vintage.
134
Popular Product
STS / CPX
Multiplex
Etcher, 4" Material used: Gas Gas box QDP80 Pump 900 Turbo pump Chiller RF No ESC Throttle valve Bac
127
Popular Product
STS / CPX
Multiplex
Advanced Oxide Etcher (AOE) Loadlock module, 4" AOE Chamber module LEYBOLD Mag-Lev Turbo pump: 2000
167
Popular Product
STS / CPX
Multiplex
ICP AOE system, 4" Load lock Previously used for oxide, pyrex, quartz etching Process gases plumbed:
129
Popular Product
STS / CPX
Multiplex
Cluster ICP etcher, 8″ Brooks VCE4 and Mtr5 robot C033 Cluster handler (2) Temperature controlled li
96
Popular Product
STS / CPX
Multiplex
ICP Etcher (1) Chamber: Poly / Oxide (1) Transfer chamber (1) Vacuum cassette loadlock (2) Process
130
