Used STS / CPX MESC Multiplex #9261950 for sale

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ID: 9261950
Wafer Size: 4"-6"
Vintage: 2000
ICP Etcher, 4"-6" With Silicon and Poly-Si Wafer material: Quartz, Si, glass Process gas: SF6, O2 Etch rate: 1µm ~ 5µm / Minutes Missing parts: Turbo pump Dry pump Chiller Power supply: 208 V, 80 A, 60 Hz, 3 Phase 2000 vintage.
STS / CPX MESC Multiplex is an advanced etcher / asher technology that enables users to perform precise and complex etching and ashing of tiny intricate patterns on various samples. As an asher, STS MESC Multiplex uses a high-power source of concentrated energy, primarily plasma, to remove material from a surface without damaging the underlying substrate. As an etcher, this technology uses plasmas at different levels of ion-neutrality to selectively etch and pattern desired features without damaging the underlying layer or substrate. CPX MESC Multiplex is a series of universal all-in-one technology, designed to meet the most demanding requirements of the common ashing, RIE, and etching process. Its unique design and versatility allows users to accurately adjust and control the etch process to produce optimal results. The controls of MESC Multiplex includes variable power PD sources, adjustable power, and adjustable oxide and nitride layers. Additionally, this technology features anti-slag and anti-reflection as well as reduction-friendly operation. This etching / ashing tools offers a wide range of process capabilities to meet the requirements of the most demanding applications. From rapid etching of ultra-thin layers to selective etching of thick metal films - STS / CPX MESC Multiplex delivers high-end precision and unparalleled control. The integrated software and hardware technology, STS MESC Multiplex enables users to create intricate patterns in a wide range of materials. The adaptive and adjustable parameters optimize the etching process for a variety of materials. CPX MESC Multiplex has been designed to meet the highest possible standards and provides highest safety conditions. The compact design allows easy installation and use in cleanrooms, as well as all other areas of sensitive production. The built-in safety features ensure that your expensive production line will not be in any danger of damage during ashing and etching procedures. In addition to its many features, MESC Multiplex comes with the EasySet software for PC-independent operation and data management. This intuitive software simplifies the set-up of your experiments, allowing you to access, save, and manage all your data centrally. The flexible platform also allows for portability, making it ideal for use in different locations. STS / CPX MESC Multiplex is the perfect all-in-one etching / ashing solution for those seeking a reliable and precise etching tool with an abundance of features. This technology offers precision, efficiency and control while promoting environmental safety and delivering superior results.
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