Used STS / CPX MESC Multiplex for sale

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STS / CPX MESC Multiplex #9308839

STS / CPX

MESC Multiplex

ICP Etcher, 4"-6" Wafer material: Si / Glass / QUARTZ Process film: Silicon, poly-Si Process gases:
55
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STS / CPX MESC Multiplex #9185203

STS / CPX

MESC Multiplex

Plasma etcher, 6″ Loadlock system Al Chamber Dual chlorine gas and BCL3 Injection of gas mixtures: N
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