Used TEGAL 901e #293595381 for sale

TEGAL 901e Etch/Asher Equipment is a versatile parallel processing system designed for manufacturing and research and development based on etch/asher technology. It is equipped with 10,062 independent process zones, allowing users to take advantage of parallel processing technology. Utilizing a multi-stage, multi-gas approach, TEGAL 901 E can be used for a variety of etch/asher applications including deposition, metal etching, oxide removal, masking, and selective etching. 901e utilizes a ceramic chamber that is resistant to corrosion and can be heated to temperatures up to 650°C. It is constructed from advanced nickel super-alloys for optimised thermal performance and motor control. This is coupled to a two zone process chamber design, with each zone being independently sealed off from the other with a gas-tight bellows. This ensures consistent processing conditions between the two zones. The unit is controlled through a sophisticated computer controlled console. This facilitates automated sequencing of process parameters such as substrate pre-cleaning, temperature and RF power control, ionised source selection, pressure, and etch/asher cycle times. 901 E also has the capability to attach several additional peripheral pieces of equipment such as volatile organics monitors, waferhandling blades, and a vacuum gauge. This Etch/Asher Machine can be used with a wide range of gases, including Cl2, BCl3, SF6 and NF3. The tool is easily controlled and maintained via the computer controlled console and its multitude of peripheral pieces of equipment. TEGAL 901e is an incredibly powerful and reliable asset for etch/asher applications, with the flexibility to be applied to multiple process chemistries. The dependable ceramic chamber heating and two-zone capabilities of the model makes it ideal for applications in the chip production, solar cell manufacturing and photovoltaic industries.