Used TEGAL 901e for sale

TEGAL 901e
Manufacturer
TEGAL
Model
901e
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TEGAL 901e #293618054

TEGAL

901e

Plasma etcher 2003 vintage.
27
Can't find what you are looking for?
TEGAL 901e #9009940

TEGAL

901e

Plasma etcher Includes: ENI ACG-10T 1000w 13.56 RF generator, 200-240 V, 1 phase, 60 Hz Omega RD-4
47
TEGAL 901e #293635731

TEGAL

901e

Plasma etcher, 6".
53
TEGAL 901e #68489

TEGAL

901e

etcher, 3"-6" Includes: ENI ACG-10 RF Generator (1000 Watt) DEC monitor station Chart recorder Mass
55
TEGAL 901e #9381612

TEGAL

901e

Plasma etcher, 3"-6", parts machine P/N: CS900-11590 (4) Gas input lines P/N: 99-172-003/F IMN-3 Chu
73
TEGAL 901e #75520

TEGAL

901e

Plasma Etcher, rebuilt Cassette to Cassette, Polysilicon / Silicon Nitride Currently configured fo
72
TEGAL 901e #9375172

TEGAL

901e

Etchers, 5" Convertible up to 6".
81
TEGAL 901e #293595381

TEGAL

901e

Plasma etcher Port board.
42
TEGAL 901e #293590789

TEGAL

901e

Dry oxide etcher.
55
TEGAL 901e #9296890

TEGAL

901e

Etcher.
45
TEGAL 901e #9286374

TEGAL

901e

Etcher.
42
TEGAL 901e #9279345

TEGAL

901e

System Single chamber, 6" For silicon etch with SF6.
38
TEGAL 901e #9244751

TEGAL

901e

Plasma etcher.
44
TEGAL 901e #9244749

TEGAL

901e

Plasma etcher.
48
TEGAL 901e #9228768

TEGAL

901e

Etcher No pump compressor Temperature controller.
62
TEGAL 901e #9217066

TEGAL

901e

Etcher.
66
TEGAL 901e #9072033

TEGAL

901e

Etcher.
67
TEGAL 901e #9071867

TEGAL

901e

In-Line Single Wafer Plasma Etcher, 4" - 6" Cassette to cassette Currently configured for 6" wafers
65
TEGAL 901e #9004063

TEGAL

901e

Etcher.
41
TEGAL 901e #70082

TEGAL

901e

Plasma etcher, 4"-6" capability Photoresisty stripper Cassette to cassette 13.56 MHz ENI RF Generato
60
TEGAL 901e #70083

TEGAL

901e

Plasma etcher, 4"-6" capability Photoresisty asher Cassette to cassette 13.56 MHz ENI RF Generator,
49
TEGAL 901e #293654398

TEGAL

901e

Plasma etcher, 6".
5
TEGAL 901e #293616017

TEGAL

901e

Plasma etchers.
14
TEGAL 901e #9314694

TEGAL

901e

Etcher, 6".
39
TEGAL 901e #293652770

TEGAL

901e

Plasma etcher, 6".
33
TEGAL 901e #9290041

TEGAL

901e

Etcher, 4".
39
TEGAL 901e #293594314

TEGAL

901e

Etchers, 5" Convertible up to 6".
37
TEGAL 901e #9312031

TEGAL

901e

Etcher, 5"-6".
30
TEGAL 901e #9269137

TEGAL

901e

Etcher, 6".
39
Can't find what you are looking for?
TEGAL 901e #9247682

TEGAL

901e

Plasma etchers, 6" Process: Oxide dry etch.
41