Used TEGAL 901e #9269137 for sale

TEGAL 901e is a highly advanced etcher/asher equipment designed for high-volume production applications. It is an automated machine that is capable of etching a wide variety of materials, with a precision degree of up to 6 microns. It provides the highest level of accuracy and repeatability, and is capable of etching in a variety of materials, including nitride silicon, aluminum, and tungsten. It has a maximum wafer size of 12 inches and can accommodate process operator parameters. TEGAL 901 E's etch chamber is a closed box design, allowing for precise temperature and flow conditions for optimal etching results. Its CD control is a state-of-the-art linear encoder unit, which is capable of delivering precise, repeatable process results across multiple runs. The chamber itself is constructed of low-leak, stainless steel construction and includes a cold wall chuck for robust cooling system performance. In addition to its process-level capabilities, 901e is also equipped with a range of process monitoring and data logging features, including a general-purpose computerized control unit and extensive data logging capabilities. This ensures that process parameters are recorded and tracked with consistency, and any changes to the process or settings are reported accurately. This allows for improved and consistent production volumes, while providing a reliable basis for analyzing the results. 901 E also offers a robust safety program, with a safety evaluation machine that allows for the monitoring of safety-related factors throughout the entire process. In addition, it has an automatic shutdown function, which allows for a safe and efficient shutdown of the process in the event of an emergency. Overall, TEGAL 901e is a highly-advanced and advanced etcher/asher tool, and provides a reliable, time-efficient, and accurate method of etching and ashing materials. It can be used for a wide range of processes, from fine-line etching to deep etching, and is an ideal solution for high-volume production applications. Its superior accuracy and repeatability ensures that many different materials can be etched with precision and accuracy, allowing for increased success and profitability for businesses.