Used TEGAL 901e #293618054 for sale

TEGAL 901e is an etcher/asher, which is a type of device used for etching and ashing of substrates. TEGAL 901 E is capable of performing etch and ash operations on substrates up to eight inches in diameter. 901e is designed to be ergonomic and easy to use. It features an easy-to-read LCD screen with a self-calibrating microprocessor controller. This etching and ashing machine also features a airflow control valve with a range of 30-400 mm H2O, allowing the operator to adjust the air pressure for a more accurate etching and ashing. 901 E is equipped with optical monitoring equipment with a camera for viewing the etching and ashing area for positioning of the substrate. This allows for accurate alignment of the substrate and ensures the etching and ashing processes are accurate. TEGAL 901e is also designed with a substrate rotation control, to select a substrate speed range up to 120 degrees per second. This provides the flexibility to selectively etch and ash with various recipes. It also features a cooled sub-lifter assembly, which allows the substrate to be He-cooled during the etching and ashing process. TEGAL 901 E has two high-sensitivity gas dosing systems, integrated into its control panel. It also has an advanced airborne particle-monitoring system, which allows the operator to check particle levels in the operating environment. 901e has an annealing oven and thermal transfer control for etching and ashing processes. It also has an integrated vacuum unit and a bake station to further improve the etching and ashing process. 901 E is equipped with several safety features: an emergency stop button, a low-current monitoring machine, and a UV Illuminator to detect UV and abrasion hazards. TEGAL 901e is specifically designed for etching and ashing of sensitive substrates such as polymer films, foils and films to achieve high etch rates, repeatability and uniformity. This etcher/asher is ideal for the etching and ashing of substrates such as photomasks, liquid-crystal displays, organic light-emitting diodes, and thin films. TEGAL 901 E is an advanced, reliable device capable of performing successful etching and ashing operations with any substrate.