Used TEGAL 901e #9312031 for sale

TEGAL 901e
Manufacturer
TEGAL
Model
901e
ID: 9312031
Wafer Size: 5"-6"
Etcher, 5"-6".
TEGAL 901e is an advanced etcher designed for use in a variety of etching applications. It's a fully-integrated equipment, with a multilayer film etching station, three-chamber batch (batch) etching process, and an integrated system thermal management unit. TEGAL 901 E is equipped with high-performance resist, an adjustable etching chamber, high-precision mask alignment, wafer temperature control, and optional dust and solvent purification systems. 901e allows up to three-step film etching processes, allowing the user to etch a variety of film thicknesses, densities, and thickness tolerances. The etching process is completely automated and worked under the ExactMetrology software suite, which allows the user to process multiple processing parameters. 901 E's multilayer process allows the user to etch multiple layers of film at once, making it a great tool for the mass production of circuit boards, electronic components, and other intricate hardware products. Equipped with a high-performance resist layer, TEGAL 901e can etch a broad range of patterns and shapes. The adjustable etching chamber allows etching of multiple materials, including gold, silver, aluminum, and palladium alloys. TEGAL 901 E's overlap bond feature allows for the application of superior film resolution and uniformity. Additionally, the software-controlled plasma pressure control machine and wafer temperature control ensure that the etch process is efficient and precise. 901e is equipped with a number of sophisticated technology-based systems to improve its performance. High precision mask alignment allows exact alignment and repetition of patterns, while the optional dust and solvent purification systems help maintain a clean environment, ensuring safe and efficient etching. With a high output of 50 cm2/min, 901 E can quickly and accurately etch a range of substrates and materials. Overall, TEGAL 901e is an advanced etching tool capable of producing highly accurate and efficient results. Its state-of-the-art technology, versatile and adjustable etching chamber, and user-friendly interface make it a great choice for etching applications. Its robust capabilities, combined with its enhanced safety protocols and high output rate, make TEGAL 901 E an ideal solution for the mass production of intricate parts and components.
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