Used TEGAL 901e #9314694 for sale

TEGAL 901e Asher is a modern, high-tech etching equipment for the production of circuit boards and other components. It is a system that combines the latest in Chemical Mechanical Planarization (CMP), Reactive Ion Etch (RIE) and Wafer Clean. TEGAL 901 E is a high performance dry-etch unit that uses reactive oxygen mixtures to produce circuit board components with high spatial resolution. The basic construction of 901e includes two gas boxes that create and manage flow of the precise mixtures of gases required for the etching process. These gas boxes are located on top of and below the etching chamber. The etching chamber is a stainless steel vacuum-tight processing chamber that houses the carrier/mask, target board and substrate. It has a Pressure Control machine integrated into the chamber door and is equipped with a rapid vent valve for secure opening and closing of the chamber. 901 E has a 4-zone, 4 micron level heating tool and a controller that provides precise control of the temperature and gas delivery for each etching step. TEGAL 901e includes a powerful Pulsed Power Generator which provides a controlled and consistent distribution of energy to the target and carrier. This allows for precise control of uniformity, selectivity and etch rate capabilities. It is a fully automated asset which allows for both single mask or multiple mask etching. Additionally, TEGAL 901 E offers built-in data logging, cleaning and end-stage inspections, allowing for repeatability and minimal waste of materials the etching stages. 901e is equipped with advanced safety features,including temperature, pressure and strain sensors. The model is designed with ergonomic operational doors with lockable handle,interlock support hooks and explosion-proof glass, ensuring the highest level of safety in the etching process. The performance of 901 E is among the best in the market as it is able to produce etch resolution of 5 microns and faster deposition rate for copper, aluminum and other materials. The equipment operates in consistent, repeatable results. Its advanced features make it an ideal etching system for electrical circuit boards, integrated circuits and other critical components.