Used TEGAL 901e #9071867 for sale
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ID: 9071867
In-Line Single Wafer Plasma Etcher, 4" - 6"
Cassette to cassette
Currently configured for 6" wafers
Super Spatula transport
Generator: ENI ACG-10B
Monitor: Dec VT 520
MFC's: UNIT 8100
Atmospheric sensor for venting
Temperature controller: choice of Neslab or Tek-Temp
Dry pump: Edwards QDP40
208V, 3 phase.
TEGAL 901e is a state-of-the-art etcher/asher that is widely used in the semiconductor industry. It is one of the most versatile and powerful ashers on the market, capable of performing a wide range of tasks, from etching to ashing. TEGAL 901 E is reliable and cost effective, with features that make it a perfect solution for any number of different applications. 901e boasts a number of features that make it an excellent choice for all types of etching and ashing. It offers a wide variety of gases, including argon and oxygen, as well as a range of temperatures ideal for various etching and ashing operations. 901 E also features a highly efficient power supply and pumps that provide a steady flow of gas and even temperatures throughout the working area. Additionally, TEGAL 901e has a number of safety features, such as temperature, gas, and pressure sensors, as well as a filter for particle concentration. TEGAL 901 E is capable of a variety of etching and ashing techniques, such as spin etching, chemical-mechanical polishing, chemical etching, and chemical-mechanical polishing. 901e is also capable of wet etching processes, as it can be integrated with wet benches for added convenience. To facilitate efficient etching and ashing operations, 901 E features a user-friendly PC control system. This system provides a wide range of features, including a real-time graph of the temperature, pressure, and other parameters that are customizable and updated in real-time. TEGAL 901e also offers a variety of recipes and diagnostic programs to help ensure it is operating correctly, as well as a recipe upload capability for rapid prototyping and product testing. To ensure the highest quality work and accuracy, TEGAL 901 E is equipped with a large terraced workspace, allowing for easy movement of sample materials. 901e also features a number of safety features, such as gas detectors and emergency air escapes, to protect both the operator and the etching and ashing operation. 901 E is an ideal etcher and asher for any type of semiconductor etching and ashing operations, as well as other more general applications. Its efficient and sophisticated design, as well as its user-friendly PC control system, make TEGAL 901e a superb choice for any number of different etching and ashing operations.
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