Used TEGAL 901e #9217066 for sale

TEGAL 901e is an etcher/asher that utilizes Soft X-Ray technology to shape and process materials with finer resolution than other patterning techniques. TEGAL 901 E uses a programmable beam of energetic X-Ray photons to precisely etch away layers of material, creating desired patterns and shapes with clean, smooth edges and exceptional detail. 901e offers highly precise and fast material patterns as small as 1.5nm in size at relatively low cost compared to other systems. It is designed for both R&D and production applications in the semiconductor electronics and MEMS markets. This equipment enables a variety of processes, such as: bulk and surface etching, pattern-defined deposition and removal, RIE (Reactive Ion Etching), MEMS, and other advanced high-resolution processes. 901 E is unique in its integration of Soft X-Ray and optical system components as a single turnkey unit. This integration gives the etcher/asher a well-rounded set of features unlike any other machine on the market. The tool is designed for secure 24/7 operation, with a fully-customizable user interface that increases routine process quality and fine-tunes repeatable results. TEGAL 901e is based on a high-end, single-piece monochromator-mounted X-Ray source and multi-axis electron beam collimation optics, which direct the beam to the target substrate. It also offers a range of variable parameters, including dose, focus, etch rate, and more. A closed-loop digital feedback loop monitors etch progress to ensure consistent results, while an array of environmental control features ensure the asset is performing safely and efficiently. TEGAL 901 E is compatible with both aluminum and silicon oxide etching chemicals. 901e offers a suite of advanced automation features to increase efficiency and throughput while also minimizing cost and downtime. It includes integrated recipe-management, which reduces complexity and setup time, as well as automated defect management, which ensures repeatable process performance and increased yield. Additionally, the model supports remote monitoring and control from multiple locations. Overall, 901 E is the ideal etcher/asher for R&D, prototyping, and production needs. Its integrated Soft X-Ray equipment, user-friendly interface, and high-precision results make it a reliable and cost-effective choice for a wide range of applications.