Used TEGAL 901e #9247682 for sale

TEGAL 901e Etch/Asher is an advanced lithography equipment designed for ultra-large wafer operations. It offers a variety of uniform, isotropic etching and planarization processes for all device types. The system leverages the latest advancements in cell side and substrate preparation technologies to deliver superior uniformity and control of all etching and planarization processes. TEGAL 901 E utilizes a large active area of 330mm and is available in both single and multi-step platforms, allowing for more dynamic recipes and flexibility in etching structure. The platform is driven by Windows-based recipe software, TEGAL Recipe Manager (TRM), which enables operators to build customized recipes, streamline operations and increase throughput. 901e's xenon lamp driven light source and Smart Heater software controller enables excellent photo-definable etch results at a wide range of temperatures, enabling operators to combine both uniformity and speed in the production environment. Additionally, the unit offers high speed transfer and scanning abilities, with a maximum scan rate of 300mm/sec. 901 E has been designed with safety in mind, featuring a number of safety-orientated functions and warnings for operators. The machine has undergone a number of fail-safe tests to ensure high hardware and software reliability. In terms of supporting hardware, TEGAL 901e is capable of connecting to a variety of host computers, providing compatibility with a wide range of operating systems. Additionally, the tool can accept CAM files from most standard lithography tools, and can output confirmation data files to guarantee accuracy and quality during production. TEGAL 901 E is an ideal choice for ultra-large wafer operations, offering a high degree of reliability, flexibility and control. The asset's proven uniformity, speed and efficiency ensures that the user is able to produce devices with precision and accuracy.