Used TEGAL 901e #293811529 for sale

TEGAL 901e is an advanced etcher / asher designed for precision etching and/or ashing of wafers. Built upon TEGAL proven 900 Series architecture and incorporating new materials, innovative engineering and state-of-the-art technology, TEGAL 901 E is capable of high yield production of various device structures. 901e is designed to have a modular architecture for easier maintenance and upgrades. The etcher/asher equipment is constructed from the highest quality materials, ensuring improved performance and durability. The system features the latest in etching and cleaning technologies, including multiple vacuum chamber design, improved gas shielding and low-pressure low-temperature (LP/LT) etching processes. The capability to process 150mm wafers make 901 E more efficient, as it can reduce clean-up between wafers and increase throughput. TEGAL 901e also conveniently features an integrated temperature control unit, allowing for consistent temperature environment across the etch chamber. This ensures improved etch uniformity and the prevention of contamination. The machine also features an automated monitoring and control tool, enabling operators to track the state of their process and make adjustments as needed. TEGAL 901 E has been designed specifically to provide accurate, high-quality etching and cleaning of devices. 901e includes a range of process optimization tools, including automated process tuning, process emulation and diagnostics capabilities, to further enhance accuracy and quality of devices. In addition, the asset boasts a suite of intuitive user-friendly software that makes operation and maintenance easier. The software helps operators schedule, monitor, and manage processes within a clean, controlled environment. It is designed to ensure optimal quality control, flexible process scheduling, and minimal downtime. 901 E is a leading etcher/asher in the production of advanced semiconductor devices. It is designed to provide rapid, precise etching and cleaning capabilities along with the flexibility to customize process settings and the convenience of an automated monitoring and control model. TEGAL 901e is an ideal choice for semiconductor production in a variety of industries.