Used TEGAL 901e #293616017 for sale

TEGAL 901e is an advanced etcher / asher designed for use in a wide variety of electrochemical and related processes. It features a multi-chamber design capable of accommodating large tool catches. Each of the four chambers is independently controlled onboard, allowing for etching and ashing of different substrates and materials in each chamber at the same time. TEGAL 901 E comes equipped with a three-zone temperature control equipment, allowing you to adjust temperatures in the tool chamber, solid precursor delivery chamber, and etching chamber separately. Temperature is regulated to within +/- 1°C accuracy, providing precise control of process parameters during etching or ashing. 901e also includes a five-gas mix delivery system, allowing you to adjust the level of oxygen, chlorine, argon, nitrogen, and sulfur dioxide levels within a precise range. The powerful 901 E utilizes a real-time data acquisition unit to transfer process data to a PC or other computer interface. This information can be used to make process changes and monitor performance. TEGAL 901e is capable of precise patterning with adjustable speed and spacing parameters. The selectable etchant flow rate, laser power, and cooling machine provide efficient removal of undesired material. TEGAL 901 E also features a high-speed scanning feature, allowing it to perform etching / ashing for substrate thicknesses ranging from 250 µm to 10 mm. 901e has an intuitive graphical user interface and a built-in LCD panel. It includes several safety features, such as an automatic pressure control tool and thermal cut-off switches. The intuitive and easy to use control software allows users to easily access and save process recipes and profile data. 901 E is an advanced and powerful etching and ashing tool, perfect for electronic and electrochemical prototyping and manufacturing.