Used TEGAL 901e #293723711 for sale

TEGAL 901e is a platform for advanced Single-Wafer Dielectric Etch and Asher. The equipment is designed to process 200mm wafers and is built to support both wet and dry process. The etcher / asher is a modular system that enables fast and accurate etching process control and temperature uniformity in both horizontal and vertical configurations. The unit boasts of built-in intelligent processes control technology which allows for easy debugging and fast reaction times. As an etcher, TEGAL 901 E builds on the same principles as its predecessors to provide higher throughput and greater process control. The etcher is also capable of producing high aspect ratio etches with an accuracy of up to +/- 0.005 um as well as minimising damage to the top side of the wafer. As an asher, 901e offers advanced plasma chemistry control to minimise microparticles and particles. Furthermore, the machine utilizes enhanced beam control technology to offer uniform etching over the entire surface of the wafer. The tool also features a sustainable submerged filter asset that effectively captures particles and minimizes contamination. 901 E has a dedicated sidewall protection shower and a heated shower plate which allows for safe and reliable etching and ashing. Additionally, the model includes an FX-Solid port which makes possible in-situ SEG measurements during a wafer run. TEGAL 901e is equipped with an innovative touchscreen interface that enables the user to quickly and easily set up and monitor process. The equipment also offers post processing traceability and an integrated media management system that allows for efficient process monitoring and CD repeatability. To deliver accurate chemistry control, the unit houses a sophisticated automation circuit that continually monitors and maintains process parameters. In addition, TEGAL 901 E's data communications protocol allows for easy integration with external devices and industry standard software. 901e is built to meet the highest safety standards, making it an ideal choice for production environment. The robust construction of the machine ensures reliable and safe operation, making it a dependable etcher / asher solution for advanced wafer processing.