Used TEGAL 901e #293652770 for sale

TEGAL 901e
Manufacturer
TEGAL
Model
901e
ID: 293652770
Wafer Size: 6"
Plasma etcher, 6".
TEGAL 901e is a powerful etcher/asher designed for high-precision applications. It is used for creating intricate patterns, micro-etching, and deep structures on a variety of materials, including metals, alloys, plastics, ceramics, and semiconductor materials. TEGAL 901 E features dual beam, dual frequency, and dual pulse modulation for uncompromising accuracy and reproducibility of results. It employs a unique plungerless self-assembled reaction chamber with a selectable pressure range of 50 to 250 millibar. The equipment is built with a temperature-controlled environment, capable of reaching the process related temperatures up to 2500°C in a high-vacuum environment, allowing for high-precision plasma etching. 901e is equipped with a high-resolution X-Y scanner and a user-selectable z-axis motorized displacement control, allowing for precise control over the depth of etching. It also features a high-speed etching rate, allowing the system to make upwards of 15,000 etchings in one hour. 901 E is designed to offer flexibility, allowing users to select several etch types, including wet etching, dry etching, reactive ion etching, and deep reactive ion etching, as well as different chemistries for each etch type. The unit also features a user-friendly graphical user interface, allowing users to readily edit recipes and control the machine from a remote interface. TEGAL 901e is ideal for various etching applications, including reactive ion etching through the gate layers of integrated circuits, creating intricate patterns for medical implants, and creating highly detailed images for displays and light fixtures. It is also used for surface treatments and micro-etching, such as anisotropic etching for the fabrication of very complex nano-structures. Overall, TEGAL 901 E offers precision and repeatability, allowing users to easily and quickly etch intricate designs while maintaining superior accuracy. With its versatile design and easy-to-use user interface, 901e is a great choice for researchers and manufacturers looking for a powerful and accurate etcher.
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