Used TEGAL 901e #293635731 for sale

TEGAL 901e is an advanced etcher designed to produce highly precise patterns and patterns with small features or narrow geometries. It is one of the most reliable, effective and efficient etchers available on the market. The system utilizes plasma-enhanced chemical vapor deposition (PECVD) and other technologies to evaporate materials and create features with the use of templating that allows for the creation of fine, defined features at sizes down to the nanoscale. TEGAL 901 E is built on the industry-standard platform, capable of providing clean, repeatable results while requiring minimal maintenance. The device features a self-positioning work table with a built-in electrostatic chuck that measures up to 500 mm in diameter, allowing it to accommodate a wide range of substrates and materials. Substrates are processed in a controlled atmosphere, ensuring reliable, repeatable processing. 901e is fully automated, with a touch screen user interface that allows for the selection of recipes for incremental tuning. Recipes are stored in the memory for future reference, allowing for rapid changes in patterning from one application to another. The system utilizes a multi-emittance ion source which emits ions of multiple energies at different angles to ensure that materials are patterned accurately. Its vacuum system is state-of-the-art, enabling long life and high-precision etching. 901 E is designed to perform precision patterning with multiple levels of etching, making it ideal for applications such as semiconductor device production. TEGAL 901e is a highly reliable and powerful etcher that offers remarkable control in multilayered and challenging advanced device fabrication settings. Its intelligent features and top-notch performance allow it to be used in professional settings and advanced materials research applications. Its reliable performance and efficient operation guarantee superior results.