Used TEGAL 901e #293654398 for sale

TEGAL 901e is a reactive ion etcher that is capable of both etching and ashing processes. It is a state-of-the-art semiconductor process tool, featuring a flat panel display, intuitive user interface, and high-capacity, high-throughput operation. Using advanced plasma etching technology, TEGAL 901 E provides precise, consistent etching and ashing of photoresists and other materials. 901e etcher/asher has three chambers - dual etching chambers and a single asher chamber. The etching chamber is used to etch a material, while the asher chamber will as to remove residue and debris from the surface. This product is powered by a direct current power supply, and features a high-performance, fully computer controlled, and microcontroller based equipment. 901 E uses a high-vacuum system to provide excellent simplicity of operation, precise process control, and contamination-free wafers. TEGAL 901e etcher/asher includes a high-precision, full-color LCD touchscreen display for making both etching and ashing settings and adjustments. The parameters are adjustable for both etching and ashing processes, and include the rate, the temperature, the pressure, and the gas compositional. All parameters and settings can be configured and stored, allowing quick set up and easy operation. For the etching process, TEGAL 901 E features two internal unbalanced magnetron sputter sources, providing uniform deposition of the material on the wafer. For the ashing process, two load-locked asher chambers are provided that utilize both a cold plasma asher and hot plasma asher. The RF power supply of 901e also features a fully computer-controlled unit, allowing for precise control of the etching and ashing process. 901 E etcher/asher is equipped with an integrated control machine, allowing for control of up to 16 wafers at a time. The wafers are accommodated on a single belt, allowing for batch processing of multiple wafers. TEGAL 901e is also equipped with a fast sample loading/retrieval tool, enabling high productivity and throughput. TEGAL 901 E etcher/asher is an efficient, precise and cost-effective etching and ashing solution for any production environment.