Used TEGAL 901e #70079 for sale
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ID: 70079
Wafer Size: 4" - 6"
plasma etcher, 4"-6" capability
Polysilicon /Silicon Nitride Plasma Etcher
Cassette to cassette
13.56 MHz ENI RF Generator, 1000W
Microprocessor control
Non-friction spatula wafer transport.
TEGAL 901e etcher/asher is a highly advanced bot that is capable of performing high-precision, high-volume etching and ashing processes with unparalleled accuracy. TEGAL 901 E is a customizable, higgins speed etcher/asher, particularly suited for various advanced applications in the semiconductor industry. 901e features a highly advanced chemistry delivery system that delivers accurate volumes of etching and ashing chemicals quickly and precisely every time. This ensures that every substrate etching and ashing process is done quickly and accurately within defined specifications. 901 E also features an advanced stage system which automatically position the wafer for better throughput. In addition, it is capable of precisely controlling the resolution and definition of any etching and ashing processes, enabling the user to make the most of their substrates, thus ensuring the most accurate processes and results. TEGAL 901e is built on a fully-integrated software platform, making it simple to integrate into existing processes, and it is equipped with a robust process control technology that allows complex etching and ashing processes to be customized to exacting specifications. It is also capable of automatically controlling the etching and ashing process parameters to make sure that the process goes of without a hitch. One of the most beneficial features of TEGAL 901 E is its ability to etch and ashe with a wide range of material thicknesses. This is achieved through a unique multi-stage etching option, where etching can occur at any wafer thickness, enabling the user to get the most out of their substrates. The user also has access to a variety of advanced process options and customization tools, enabling them to fine-tune their etching and ashing process parameters. 901e also has a variety of sensors that allow the user to monitor process steps, track process parameters, and the results of the etching and ashing process. Overall, 901 E etcher/asher is an advanced, powerful, and reliable etching and ashing bot that is perfect for a variety of semiconductor applications. Its advanced chemistries and stage system, its precise process control, and its wide range of etching and ashing options enable the user to make the most of their substrates and processes.
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