Used TEGAL 901e #9191347 for sale

TEGAL 901e is a state-of-the-art etcher / asher designed for the production of silicon wafers and related semiconductor components. It is powered by an advanced and precise closed-loop control equipment which regulates process parameters such as etch rate, temperature, and pressure, providing users with a consistent and optimal performance. TEGAL 901 E features a number of controls and features designed specifically for the etching and ashing process, including a highly precise automatic rate control system and a closed-loop pressure control unit which provides precise pressure control and precise repeatability, ensuring consistent results. Additionally, the unit includes an integrated cool-down machine, which allows the chamber and materials to cool efficiently, providing improved accuracy and higher yields. 901e is powered by a flexible, user-friendly touch-screen interface, which is easy to operate and provides step-by-step instructions for all process control and monitoring functions. The unit is also capable of storing and loading up to ten recipes, making it ideal for quickly and accurately producing a range of different wafer and component designs with minimal additional setup time. 901 E is designed with a variety of safety features, including monitoring and warning systems for dangerous temperatures, internal pressure, and leakage. The etcher is also designed to maintain the optimum process environment, with variable temperature and pressure settings, and powerful argon wash for gas and vapour control. Additionally, TEGAL 901e features a built-in particle collection tool to keep the working environment clean and safe. TEGAL 901 E is a reliable and advanced etcher / asher designed specifically for the production of silicon wafers and related components. It features closed-loop process control, a user friendly touch-screen interface, and advanced safety features, making it an ideal tool for reliable and precise etching, ashing, and wafer production.