Used TEGAL 901e #9244749 for sale

TEGAL 901e is an advanced plasma etcher / asher designed for precision etching of electronic circuits and micro-structured surfaces. It is capable of processing substrates up to 200mm (8") in diameter and is capable of reaching etch rates of up to 10 microns per minute. TEGAL 901 E utilizes direct-coupled-plasma (DCP) technology to apply a highly reactive plasma to substrates. This plasma is powered by radio-frequency energy and is generated in an isolated, ventilated chamber within 901e. This process creates a precise, uniform etching response across the entire workspace without any damage to the substrate's surfaces. Additionally, the entire processing chamber is specifically designed to contain the plasma, preventing it from escaping into the work space. 901 E is also capable of precise beam profile control and setup through the use of a digitally controlled, multi-dimensional gas distribution equipment. This gas delivery system allows users to precisely control the beam delivery profile and eliminate any vertical or horizontal step-loading of etching. TEGAL 901e offers a range of advanced process control and monitoring systems to ensure accuracy and consistency during operation. It offers real-time temperature and pressure readouts to ensure precise and repeatable performance. This unit also provides a variety of sensors and feedback systems to monitor process parameters and display the resulting data graphically in an easy-to-understand format. Additionally, TEGAL 901 E features an integrated coolant supply machine to help regulate the temperature of the chamber and substrate. This coolant delivery tool can be further controlled and adjusted for increased accuracy and repeatability. 901e also offers safety and convenience features, such as an interlock door switch to prevent unintentional operation of the asset. It also comes with an automatically high/low alarms and related push-buttons. Overall, 901 E is an efficient and precise etcher / asher designed to process substrates up to 200mm in diameter with accuracy and repeatability. Its advanced features, including real-time temperature and pressure readouts, digitally coded beam profile control, integrated coolant model and safety systems make it an ideal choice for any precision etching or ashing application.