Used TEGAL 981 #9249070 for sale

TEGAL 981 is an advanced etcher / asher equipment designed for precision and superior performance. This system can be used for a wide range of etching and ashing applications, including those for semiconductors, flat panel displays, MEMS and other electronic components. 981 sets a new standard for advanced etching and ashing by offering superior flexibility and expandability. TEGAL 981 features an electromagnetic interference (EMI) reduction base plate technology that utilizes conductive shields and shields in combination with a wafer holder, power source and manifold pedestal. This provides a safe and uniform etching and ashing process, while at the same time reducing the unit's EMI signature. 981 also features a wafer holder compatible with various wafer sizes, a manual and automatic pressure control machine, and a configurable etch/ash process recipe. TEGAL 981 is capable of quickly and precisely etching and ashing products of different sizes and shapes. This tool is configurable for etching and ashing with a wide range of available beginning and ending etching/ashing recipes. 981 also allows for etching and ashing of different substrates such as silicon, quartz, and metal alloys, as well as etching glass and sapphire in the same etching chamber. In addition to the etching and ashing capabilities, TEGAL 981 includes a gas enabled chamber for photoresist stripping and implantation. This chamber is capable of operating at low pressures, such as 100 mTorr, and speeds up to 1,000 steps/second. Furthermore, the asset features a user-friendly interface with training mode as well as a color graphical display. 981 is made of premium quality materials, and its construction is designed to prevent contamination and eliminate heat buildup. This model also meets stringent safety standards and is compliant with different international safety regulations. It features a patented Energy Recovery Equipment (ERS), designed to reduce energy consumption while ensuring high etching and ashing performance. TEGAL 981 is an excellent choice for any etching and ashing application. Its superior performance and flexibility, as well as its reduced EMI signature make it one of the most advanced etching / ashing systems in the market.