Used TEGAL 981 for sale

TEGAL 981
Manufacturer
TEGAL
Model
981
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TEGAL 981 #9159791

TEGAL

981

Etcher, 8" Process: Nitride Single chamber Silicon nitride Etcher Chiller Pump Hazardous gases utili
10
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TEGAL 981 #9267872

TEGAL

981

Silicon nitride etcher, 8" Single chamber.
78
TEGAL 981 #9249070

TEGAL

981

Etcher, 8".
48