Used TEGAL Plasmod #133169 for sale
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ID: 133169
Etcher, 115 VAC
13.56 MHz RF generator
Manual tuning
Pyrex chamber
Gas input
Inner chamber diameter is 4.25"
Outer chamber diameter is 4.5"
Chamber depth is 6.2".
TEGAL Plasmod is a state-of-the-art etcher/asher combining the use of both physical and chemical techniques to effectively create intricate patterns on a variety of materials. The device consists of an upper etch chamber, in the lower portion of which the laser beam is focused, and a lower etch chamber for the gas delivery. The upper chamber is fitted with a removable nozzle that precisely directs a CO2 laser beam at the target material. This laser delivers energy to the location which needs to be etched. The laser energy then reacts with the material, removing or changing the material's affected area to match the desired pattern. The laser is also equipped with a beam homogenizer, which ensures a more even surface treatment. In the lower chamber, a gas generator is employed to fill the confined space with inert gas. Depending upon the material and desired pattern, the gas flow is adjusted to match the requirements. This helps in equalizing the laser energy and consequently, prevents warping and burning of the substrate. Plasmod is also capable of performing laser-induced chemical etching (LICE), which is a process of producing intricate patterns in a fraction of the time as compared to the regular mechanically-etched receivers. It relies on a chemical etchant, such as a reactive-ion-etcher, which functions as a selective etchant and enhances the laser energy for increased removal of material. The reactive-ion-etcher also helps in reducing surface contamination and keeping the substrate intact throughout the etching process. To ensure accurate patterning, TEGAL Plasmod offers various quality control features such as a three-axis CCD video camera, providing high-resolution images, and automated metrology software for quick measuring of the etched areas. The etcher also features a graphical user interface that enables easy and quick setting of parameters for increased productivity and accuracy. Plasmod is a versatile and powerful tool, suitable for a variety of etching and ashing processes and guarantees a high level of precision, quality and repeatability. The device is an ideal choice for those looking for an advanced etching/ashing solution and is capable of delivering exceptional results in aerospace, medical and automotive industries.
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